The fabrication of suspended micromechanical structures from bulk 6H-SiC using an ICP-RIE system
We have successfully fabricated freestanding single-crystal 6H-SiC cantilevers of several microns size using bulk micromachining with an inductively coupled plasma reactive ion etching system. We have also used these SiC cantilever structures to measure Young's modulus through the use of an atomic force microscope. The measurements were performed on a series of 13 µm thick and 20 µm wide cantilevers with lengths ranging from 100 µm to 350 µm. The average measured Young's modulus of 441 GPa is in excellent agreement with the documented values in the literature.