Characteristics of one-port surface acoustic
wave (SAW) resonators fabricated on ZnO and 6H-SiC layered structure were
investigated experimentally and theoretically. Phase velocities (V p),
electromechanical coupling coefficients (K 2), quality factors (Q), and
temperature coefficients of frequency (TCF) of Rayleigh wave (0th mode) and
first- and second-order Sezawa wave (1st and 2nd modes, respectively) for
different piezoelectric film thickness-to-wavelength (h ZnO /λ) ratios were
systematically studied. Results demonstrated that one-port SAW resonators
fabricated on the ZnO/6H-SiC layered structure were promising for
high-frequency SAW applications with moderate K 2 and TCF values. A high K 2 of
2.44% associated with a V p of 5182 m s−1 and a TCF of −41.8 ppm/°C was
achieved at h ZnO /λ = 0.41 in the 1st mode, while a large V p of 7210 m s−1
with a K 2 of 0.19% and a TCF of −36.4 ppm/°C was obtained for h ZnO
/λ = 0.31 in the 2nd mode. Besides, most of the parameters were reported for
the first time and will be helpful for the future design and optimization of
SAW devices fabricated on ZnO/6H-SiC layered structures.
Source:IOPscience
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