An improved multi-recessed 4H–SiC metal semiconductor field effect transistor (MRD-MESFET) with double-recessed p-buffer layer (DRB-MESFET) is proposed in this paper. By introducing a double-recessed p-buffer layer, the gate depletion layer is further modulated, and higher drain saturation current and DC transconductance are obtained compared with the MRD-MESFET. The simulations show that the drain saturation current of the DRB-MESFET is about 42.4% larger than that of the MRD-MESFET. The DC transconductance of the DRB-MESFET is almost 15% higher than that of the MRD-MESFET and very close to that of double-recessed structure (DR-MESFET) at the bias conditions of Vgs=0 V and Vds=40 V. The proposed structure has an improvement of 26.1% and 74.2% in the output maximum power density compared with that of the MRD-MESFET and DR-MESFET, respectively. In the meanwhile, the proposed structure possesses smaller gate-source capacitance, which results in better RF characteristics.
Keywords
- 4H–SiC MESFET;
- Multi-recessed drift regions (MRD);
- Double-recessed p-buffer layer (DRB);
- Drain saturation current;
- DC transconductance
- Source:Sicencedirect
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